Analytical Approach in the Development of RF MEMS Switches

RF MEMS Switches

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

Development of RF MEMS Switches for High Power Applications

This paper introduces a new concept in RF MEMS switches intended for high RF signal power applications at millimetre-wave operation. The novel SPST switch architecture employs electrothermal hydraulic microactuators. Out-of-plane silicon levers, having spring action and latching mechanisms, have been designed to create an OFF-state gap separation distance of 250 μm between ohmic contact electro...

ESD effects in capacitive RF MEMS switches

RF MEMS have shown very attractive characteristics in automotive, communication, aeronautic and aerospace applications, thanks to its low mass and volume, low losses, low power consumption, high isolation and a wide operative frequency range. Moreover they have demonstrated good integration with electronics which show their ability to built-in innovative RF architectures [1]. Nevertheless the a...

Time Characterization of Capacitive Mems Rf Switches

Modeling and Fabrication of RF MEMS Switches

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...